VPE Growth of InP for Electronic Devices.
Abstract
A double dilution reactor for InP growth is described and problems concerning the fabrication of Schottky diodes and MIS contacts on InP are addressed. Device grade material has been obtained from this system.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 01, 1982
- Accession Number
- ADA120551
Entities
People
- F. J. Rosenbaum
- J. M. Bornholdt
- R. E. Goldwasser
Organizations
- University of Washington