A Novel Liquid Silazane Precursor to Silicon Nitride.
Abstract
The reaction of dichlorosilane, H2SiCl2, with gaseous ammonia in dichloromethane or diethyl ether solution results in formation of a silazane oil containing silicon, hydrogen, and nitrogen in good yield. This ammonolysis product can be pyrolyzed in a nitrogen atmosphere (temperature to 1150 C) to give alpha-Si3N4 in about 70% yield. The ceramic product formed has a relatively porous, fine-grained microstructure with some cracks and blisters.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 28, 1982
- Accession Number
- ADA121503
Entities
People
- Christian Prud'homme
- Dietmar Seyferth
- Gary H. Wiseman
Organizations
- Massachusetts Institute of Technology