A Novel Liquid Silazane Precursor to Silicon Nitride.

Abstract

The reaction of dichlorosilane, H2SiCl2, with gaseous ammonia in dichloromethane or diethyl ether solution results in formation of a silazane oil containing silicon, hydrogen, and nitrogen in good yield. This ammonolysis product can be pyrolyzed in a nitrogen atmosphere (temperature to 1150 C) to give alpha-Si3N4 in about 70% yield. The ceramic product formed has a relatively porous, fine-grained microstructure with some cracks and blisters.

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Document Details

Document Type
Technical Report
Publication Date
Oct 28, 1982
Accession Number
ADA121503

Entities

People

  • Christian Prud'homme
  • Dietmar Seyferth
  • Gary H. Wiseman

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Body Weight
  • California
  • Ceramic Bodies
  • Ceramic Materials
  • Chemistry
  • Decomposition
  • Electron Microscopy
  • Massachusetts
  • Materials
  • Materials Processing
  • Materials Science
  • Mechanical Properties
  • Military Research
  • New York
  • Silicon Carbide
  • Spectra
  • United States

Fields of Study

  • Chemistry

Readers

  • Organic Chemistry
  • Polymer Science and Technology
  • Quantum Chemistry