Monolithic ZnO SAW Structures.
Abstract
ZnO-on-silicon surface acoustic wave devices have been fabricated and tested. The first low temperature deposited AIN-on-silicon devices were reported. The performance of a high frequency transducer is discussed, and the operation of a new surface acoustic wave storage correlator, the induced junction correlator, is described.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1982
- Accession Number
- ADA121689
Entities
People
- Robert F. Pierret
- Robert L. Gunshor
Organizations
- Purdue University