Monolithic ZnO SAW Structures.

Abstract

ZnO-on-silicon surface acoustic wave devices have been fabricated and tested. The first low temperature deposited AIN-on-silicon devices were reported. The performance of a high frequency transducer is discussed, and the operation of a new surface acoustic wave storage correlator, the induced junction correlator, is described.

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1982
Accession Number
ADA121689

Entities

People

  • Robert F. Pierret
  • Robert L. Gunshor

Organizations

  • Purdue University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Acoustic Waves
  • Correlators
  • Detection
  • Electrical Engineering
  • Energy Bands
  • Frequency Response
  • Low Temperature
  • Materials
  • Phase Velocity
  • Radiation Resistance
  • Rayleigh Waves
  • Semiconductors
  • Signal Processing
  • Surface Acoustic Wave Devices
  • Surface Acoustic Waves
  • Surface Waves
  • Transducers

Readers

  • Acoustical Oceanography.
  • Integrated Circuit Design and Technology.
  • Semiconductor Device Technology