Research on Molecular Beam Epitaxy.
Abstract
Thermodynamic calculations show that phosphine should thermally dissociate into the phosphorus dimer to a high degree. Three furnaces were constructed to study the cracking of phosphine. Phosphine was found to react with tantalum, but not to any great extent with quartz. Cracking efficiencies greater than 90% were obtained with the furnace using a quartz cartridge filled with matted quartz. Molecular beam epitaxial layers of InP were grown on Cr-doped, (100)-oriented InP substrates using the quartz cartridge furnace. The 77 deg K photoluminescence spectra were comparable to other MBE InP using other types of phosphorus sources. Carrier mobility and concentrations at 77 deg K and 300 deg K were measured.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 01, 1982
- Accession Number
- ADA122209
Entities
People
- R. Chow
- Y.g. Chai