Research on Molecular Beam Epitaxy.

Abstract

Thermodynamic calculations show that phosphine should thermally dissociate into the phosphorus dimer to a high degree. Three furnaces were constructed to study the cracking of phosphine. Phosphine was found to react with tantalum, but not to any great extent with quartz. Cracking efficiencies greater than 90% were obtained with the furnace using a quartz cartridge filled with matted quartz. Molecular beam epitaxial layers of InP were grown on Cr-doped, (100)-oriented InP substrates using the quartz cartridge furnace. The 77 deg K photoluminescence spectra were comparable to other MBE InP using other types of phosphorus sources. Carrier mobility and concentrations at 77 deg K and 300 deg K were measured.

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Document Details

Document Type
Technical Report
Publication Date
May 01, 1982
Accession Number
ADA122209

Entities

People

  • R. Chow
  • Y.g. Chai

Tags

Communities of Interest

  • Biomedical
  • Energy and Power Technologies
  • Weapons Technologies

DTIC Thesaurus Topics

  • Carrier Mobility
  • Chemistry
  • Decomposition
  • Detectors
  • Flow Rate
  • Gas Cylinders
  • Heat Energy
  • High Temperature
  • Hydrogen
  • Ion Pumps
  • Materials
  • Measurement
  • Molecular Beam Epitaxy
  • Molecular Beams
  • Molecules
  • Partial Pressure
  • Spectra

Fields of Study

  • Materials science

Readers

  • Quantum Chemistry
  • Semiconductor Device Technology
  • Thermal Physics or Thermal Science.