Automation of Pre-Cap Visual Inspection for Integrated Circuits
Abstract
The feasibility of an automatic inspection system which can perform a 100% internal visual inspection of integrated circuits (ICs) during production was investigated. Columbia Research Corporation (CRC) reviewed technical approaches and the feasibility of applying them to production. They also surveyed the companies currently developing automated IC inspection systems and found that no commercial contractor has installed equipment for routine inspection on a production basis. This project was terminated because the necessary equipment is still undergoing design and evaluation.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1982
- Accession Number
- ADA123343
Entities
People
- David Flake
- Gary Niemiec
- George Fisher
- Paul Watson
Organizations
- United States Army Armament Research, Development and Engineering Center