Ion-Beam Deposited Films for Refractory-Metal Tunnel Junctions,
Abstract
In this paper we report on the ion-beam deposition of Nb and Ta films. The deposition of refractory metal films is of considerable interest because of their desirable superconducting and material properties. In particular, Nb has the highest Tc of the elemental superconductors and is favored for superconducting device applications because of its physical integrity. However, it is well known that pure Nb tunnel junctions characteristically exhibit non-ideal behavior which has been attributed to suboxide growth at the Nb/Nb2O5 interface. A very promising approach to ameliorating this situation is to cover the surface of the Nb film, in situ, with a thin overlayer of another metal which can 'cap' the Nb surface and form an improved tunneling oxide.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1982
- Accession Number
- ADA123462
Entities
People
- D. E. Prober
- D. W. Face
- S. T. Ruggiero
Organizations
- Yale University