E Beam: An Operating System for Particle Beam Lithography.
Abstract
A modular suite of subroutines, designed to provide an operating environment for the RSRE Beam Lithography Machine (EBLM-1) is described. The suite (EBEAM) will run on any PDP-11 16-bit minicomputer with sufficient memory under the RT11 or RSX-11M operating systems. Module names, peripheral addresses and instructions for installation and operation under both operating systems are given together with detailed descriptions of available commands and a list of error messages with possible causes and remedies. This memorandum is intended to be a general introduction and guide to users wishing to install and operate such a system. It does not give detailed descriptions of the individual modules and algorithms or of the hardware, as these are described elsewhere. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1982
- Accession Number
- ADA124563
Entities
People
- B. C. Merrifield
Organizations
- Royal Signals and Radar Establishment