E Beam: An Operating System for Particle Beam Lithography.

Abstract

A modular suite of subroutines, designed to provide an operating environment for the RSRE Beam Lithography Machine (EBLM-1) is described. The suite (EBEAM) will run on any PDP-11 16-bit minicomputer with sufficient memory under the RT11 or RSX-11M operating systems. Module names, peripheral addresses and instructions for installation and operation under both operating systems are given together with detailed descriptions of available commands and a list of error messages with possible causes and remedies. This memorandum is intended to be a general introduction and guide to users wishing to install and operate such a system. It does not give detailed descriptions of the individual modules and algorithms or of the hardware, as these are described elsewhere. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Oct 01, 1982
Accession Number
ADA124563

Entities

People

  • B. C. Merrifield

Organizations

  • Royal Signals and Radar Establishment

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Calibration
  • Coefficients
  • Coils
  • Computers
  • Debugging
  • Deflection
  • Deflection Coils
  • Electron Beam Lithography
  • Electron Beams
  • Electron Microscopes
  • Electron Optics
  • Lithography
  • Measurement
  • Operating Systems
  • Particle Beams
  • Real Numbers
  • Scanning Electron Microscopes

Fields of Study

  • Physics

Readers

  • Computer Science.
  • Pulsed Power and Plasma Physics.

Technology Areas

  • Directed Energy