Plasma Electron Number Density and Electron-Neutral Collision Frequency from Complex Impedance Measurements.
Abstract
The plasma within an RF driven inductive coil interacts with the electrical generation circuit providing feedback useful for control of bulk plasma parameters. An investigation, employing a tunable RF circuit, was made applying complex impedance measurements as a plasma diagnostic. Plasma-circuit effects are modeled as capacitive coupling to the driving inductor; the magnitude of the plasma model capacitance being proportional to a complex plasma permittivity. Associated impedance, when annulled by tuning, results in a real resistive load dependent upon plasma characteristics. Impedance diagnostics avoid the use of traditional internal probes. Application of this technique to inductive reactors is found to be inferior to capacitive reactors. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1982
- Accession Number
- ADA124790
Entities
People
- Thomas W. Hermanson
Organizations
- Air Force Institute of Technology