Investigation of Impurity Concentrations and Electrical Properties near Interfaces.
Abstract
Studies of the nature of the thermal conversion on semi-insulating GaAs:Cr using photoluminescence, cathodoluminescence, and secondary ion mass spectrometry are described. Improvements in a quadrupole mass spectrometer instrument for secondary ion mass spectrometry are described and the applications of this instrument to significant problems in solid state electronics are discussed. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 27, 1982
- Accession Number
- ADA126461
Entities
People
- David B. Wittry
Organizations
- University of Southern California