An Efficient Integration Technique for Use in the Multilayer Analysis of Spreading Resistance Profiles

Abstract

The efficiency of multilayer analysis in calculating resistivity profiles from spreading resistance measurements depends on the rapid numerical evaluation of the well-known correction factor integral first introduced by Schumann and Gardner. We present a new approximate form for the correction factor which allows its numerical evaluation with only 22 integrand values for each evaluation of the integral. When this technique is used in our multilayer analysis program, we unfold spreading resistance profiles at the real time rate of less than 3 sec/point on a desktop computer. Its results match those of analytic evaluations of special two layer cases or with more elaborate numerical evaluations of graded structures to within 1%.

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Document Details

Document Type
Technical Report
Publication Date
May 01, 1981
Accession Number
ADA126707

Entities

People

  • H. L. Berkowitz
  • R. A. Lux

Organizations

  • United States Army Communications-Electronics Command

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Bessel Functions
  • Conductivity
  • Current Density
  • Data Sets
  • Electrons
  • Errors
  • Integrals
  • Integrators
  • Measurement
  • New Jersey
  • Numerical Integration
  • Resistance
  • Test And Evaluation

Readers

  • Computational Modeling and Simulation
  • Finite Element Method (FEM) for solving Partial Differential Equations (PDEs)
  • Thin Film Deposition Science.