Laser Produced X-Rays for High Resolution Lithography.

Abstract

The laser-plasma interaction is characterized to gain an understanding of the spectrum of x-rays emitted by the plasma. The potential use of the radiated x-ray for lithography is explored.

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Document Details

Document Type
Technical Report
Publication Date
Jan 13, 1983
Accession Number
ADA126889

Entities

People

  • Harold Epstein

Organizations

  • Battelle Memorial Institute

Tags

Communities of Interest

  • Air Platforms
  • Biomedical
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Absorption Coefficients
  • Air Force
  • Coefficients
  • Electron Density
  • Electrons
  • Energy Bands
  • Energy Gaps
  • Equations
  • Frequency
  • High Resolution
  • Ionization
  • Ionizing Radiation
  • Soft X Rays
  • Spectra
  • X Ray Lithography
  • X Ray Spectra
  • X Rays

Fields of Study

  • Physics

Technology Areas

  • Directed Energy