Study of Electronic Transport and Breakdown in Thin Insulating Films

Abstract

Recent progress is reported in an ongoing of studies of high-field charge-carrier injection, transport, trapping, and dielectric breakdown in thin insulating films. The investigations reported here include the generation of interface states in the Si-Si02 system by ionizing radiation and by high-field stress, the high-field generation of electron traps in Si02, a method for measuring interface-state densities at low temperatures, and studies of high- field effects in the A1203-Si system.

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1977
Accession Number
ADA129172

Entities

People

  • Walter C. Johnson

Organizations

  • Princeton University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Band Gaps
  • Charge Carriers
  • Conduction Bands
  • Electric Fields
  • Electron Emission
  • Electrons
  • Emission
  • Energy Bands
  • Energy Levels
  • Films
  • Free Electrons
  • Ionizing Radiation
  • Low Temperature
  • Measurement
  • Silicon Dioxide
  • Soft X Rays
  • X Rays

Fields of Study

  • Physics

Readers

  • Semiconductor Device Technology
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics