Data Verification Programs for the RSRE E-Beam Data Format,

Abstract

A number of Fortran programs designed to verify data produced for the RSRE Electron Beam Lithography Machine (EBLM-1) are described. Data files intended for exposure by EBLM-1 can be input to any of the programs depending on the level of verification required. Output is hard copy on a Servogor 281 Digital plotter or visual on a DEC VT125 graphics terminal. The programs provide an invaluable means of checking complex data structures before committing valuable machine time and materials.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1983
Accession Number
ADA129314

Entities

People

  • B. C. Merrifield

Organizations

  • Royal Signals and Radar Establishment

Tags

DTIC Thesaurus Topics

  • Computers
  • Electron Beam Lithography
  • Electron Beams
  • Electrons
  • Graphics
  • Hard Copy
  • Instructions
  • Lithography
  • Operating Systems
  • Personality
  • Plotters
  • Plotting
  • Sequences
  • Terminals
  • Verification

Fields of Study

  • Physics

Readers

  • Computer Science.
  • Nanofabrication and Microfabrication.
  • Systems Analysis and Design

Technology Areas

  • Directed Energy
  • Microelectronics