A Study of the Sputtering Process by Ion-Induced Optical Emission.

Abstract

By performing simultaneous detection of forward-scattered Ne+ ions and photons emitted by Ne and Ni excited atoms when a Ni(110) surface was bombarded by 4 keV Ne+ ions at near-grazing incidence, we studied the ion and photon yields as a function of the azimuthal angle. The variations observed in the yield anisotropies show the different degrees of influence on the surface structure on outershell electronic processes during ion-surface collisions.

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Document Details

Document Type
Technical Report
Publication Date
Aug 31, 1981
Accession Number
ADA129684

Entities

People

  • I. S. T. Tsong

Organizations

  • Pennsylvania State University

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Anisotropy
  • Atoms
  • Base Pressure
  • Buildings And Structures
  • Collisions
  • Crystals
  • Detection
  • Electrostatic Analyzers
  • Forward Scattering
  • Ion Beams
  • Mass Spectrometry
  • Measurement
  • Particle Collisions
  • Scattering
  • Spectra
  • Spectrometry
  • Universities

Fields of Study

  • Physics

Readers

  • Electromagnetic Wave Scattering and Antenna Radiation Engineering
  • Solar Physics
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene