The Quartz Envelope Heater: A New Heating Technique for MOCVD Systems,

Abstract

The quartz envelope heater, a new heating apparatus designed specifically for metal organic chemical vapor deposition, is described. Discussed as well are its advantages over traditional heating techniques, such as RF induction heating and quartz lamp heating. The apparatus also has more general application to any chemical vapor deposition system which requires a single temperature zone to a maximum of 800 C and which does not contain reactants that chemically attack quartz glass.

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Document Details

Document Type
Technical Report
Publication Date
May 16, 1983
Accession Number
ADA130113

Entities

People

  • D. H. Barker
  • J. S. Ciofalo
  • S. I. Boldish

Organizations

  • The Aerospace Corporation

Tags

Communities of Interest

  • Advanced Electronics
  • Space

DTIC Thesaurus Topics

  • Ceramic Materials
  • Chemical Vapor Deposition
  • Electronics
  • Epitaxial Growth
  • Fluid Mechanics
  • Heat Transfer
  • Heating
  • Laser Spectroscopy
  • Materials
  • Materials Processing
  • Materials Science
  • Mechanics
  • Optical Properties
  • Physics Laboratories
  • Silicon Carbide
  • Surface Temperature
  • Vapor Deposition

Readers

  • Electrical Engineering
  • Thin Film Deposition Science.