Etched Cavity SAW (Surface Acoustic Wave) Resonator Elements for Multipole Filter Applications.

Abstract

The objective of this program is the evaluation of a unique Surface Acoustic Wave (SAW) resonator element proposed by RF Monolithics for applications in multipole bandpass filters. The economical realization of multipole SAW resonator filters having steep skirts, low loss, and high out-of-band rejection requires the availability of SAW resonator elements having specific attributes: (1) reproducibility, (2) high coupling, (3) single moded, and (4) high Q. The resonator element studied during this program was invented to satisfy these requirements. The key features of this new device are: (1) a uniform SAW velocity throughout the structure that reduces sensitivity to variations in the fabrication process, (2) independent realization of transduction and reflection functions that allow high coupling and good longitudinal mode suppression, and (3) a self-aligned multilevel process that eliminates critical alignments and promises high producibility in a volume manufacturing environment.

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1983
Accession Number
ADA131002

Entities

People

  • R. J. Kansy

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Acoustic Waves
  • Bandpass Filters
  • Cavity Resonators
  • Fabrication
  • Frequency
  • Frequency Response
  • Insertion Loss
  • Materials
  • Military Research
  • Phase Shift
  • Resonance
  • Resonant Frequency
  • Standing Waves
  • Surface Acoustic Wave Devices
  • Surface Acoustic Waves
  • Topology
  • Two Dimensional

Readers

  • Microwave Engineering.
  • Semiconductor Device Technology