Atomic and Electronic Structure of Defects in Semiconductors.

Abstract

This research was aimed at developing new techniques for the characterization of sub-micron defects in semiconductors by electron beam methods. A brief summary of the main results and a list of publications are included. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1983
Accession Number
ADA131539

Entities

People

  • J. C. H. Spence

Organizations

  • Arizona State University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Band Structures
  • Contracts
  • Crystal Defects
  • Diffraction
  • Electron Beams
  • Electron Diffraction
  • Electron Energy
  • Electron Microscopes
  • Electron Microscopy
  • Electrons
  • Energy Bands
  • High Resolution
  • Microscopy
  • Semiconductors
  • Spectra
  • Spectroscopy
  • Surface Properties

Readers

  • Technical Research and Report Writing.
  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics