Silicide Formation and Schottky Barrier of Rare-Earth Metals on SI

Abstract

During this period, our activities included the following: The arrival of the General Ionex Tandetron accelerator. We are now setting this machine up for backscattering experiments. We expect to be on-line in a few months. Perfecting of the technique of fabricating pit-free ErSi2 diodes. Measurement barrier heights of Er and ErSi2 on p and n type Si. For p-type Si the measurements were done at room temperature. For n-type Si, the measurements were done at 77 degrees K. Presentation of an invited paper entitled Ion Mixing and Phase Diagrams at the international conference on Ion Beam Modification of Materials, Grenoble, France, August 1982 (see Appendix A). This paper was written in collaboration with Caltech (B. X. Liu and M-A. Nicolet). Presentation of a paper entitled Surface Morphology and Electronic Properties of Erbium Silicide at the annual MRS meeting held in Boston, November 1982 (see Appendix B).

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Document Details

Document Type
Technical Report
Publication Date
Sep 30, 1983
Accession Number
ADA131749

Entities

People

  • S. S. Lau

Organizations

  • University of California, San Diego

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Critical Temperature
  • Crystal Structure
  • Energy
  • Films
  • Ion Implantation
  • Jet Propulsion
  • Low Temperature
  • Materials
  • Measurement
  • New York
  • Phase Diagrams
  • Rare Earth Elements
  • Schottky Diodes
  • Solid Solutions
  • Thin Films
  • Transition Metals
  • Transition Temperature

Readers

  • Academic Conference Management
  • Materials Science and Engineering.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics