The Study of Thin Films on Semi-Insulating Gallium Arsenide by Ellipsometry.
Abstract
A computer-grid procedure is discussed where delta and psi values obtained from a thin filmed surface are used to estimate the optical constants of the film-free surface. Thin films can be measured with reasonable accuracy on gallium arsenide; however, the optical constants of these films cannot be obtained. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1983
- Accession Number
- ADA131844
Entities
People
- Neil T. Mcdevitt
- William L. Baun
Organizations
- Wright Laboratory