Radiolysis of Resist Polymers. 1. Poly(methyl-alpha-haloacrylates) and Copolymers with Methylmethacrylate.

Abstract

Methyl alpha-chloroacrylate (MCA) and methyl alpha-bromoacrylate (MBA) were copolymerized with methyl methacrylate (MMA) over a broad range of composition. The copolymers were exposed to gamma-radiation to determine chain scission susceptibility. The mechanisms of degradation of copolymers towards radiation was suggested from product analysis. The radiolysis of copolymers of MMA with MCA and MBA are dominated by the alpha-halogenated monomers. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1983
Accession Number
ADA131864

Entities

People

  • A. Narula
  • G. N. Babu
  • James C. W. Chien
  • S. L. Hsu

Organizations

  • University of Massachusetts Amherst

Tags

DTIC Thesaurus Topics

  • Alkenes
  • Chemical Synthesis
  • Chemistry
  • Copolymers
  • Electron Capture
  • Engineering
  • Equations
  • Gamma Rays
  • Mass Spectrometry
  • Massachusetts
  • Materials
  • Methacrylates
  • Military Research
  • Molecular Weight
  • Polymers
  • Radiation
  • Spectra

Readers

  • Nuclear and Radiation Engineering.
  • Polymer Science and Technology

Technology Areas

  • Microelectronics