Radiolysis of Resist Polymers. III. Copolymers of Methyl-Alpha-Chloroacrylate and Trihaloethylmethacrylates.

Abstract

Homopolymers of 2,2,2-trifluoroethyl methacrylate (TFEMA) and 2,2,2-trichloroethyl methacrylate (TCEMA) and copolymers with methyl alpha-chloroacrylate (MCA) of a range of composition were synthesized. Radiolysis of copolymers are initiated by dissociative electron capture by the halogen atom. GC-MS analysis of volatile products show that the poly(TFEMA) tend to depolymerize but not poly(TCEMA). Some of the polymers merit further investigations for E-beam or X-ray lithographic applications. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1983
Accession Number
ADA132032

Entities

People

  • G. N. Babu
  • J. C. W. Chien
  • P. H. Lu
  • S. L. Hsu

Organizations

  • University of Massachusetts Amherst

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Chemical Synthesis
  • Chemistry
  • Copolymers
  • Electron Capture
  • Electrons
  • Engineering
  • Halogens
  • Lithography
  • Low Temperature
  • Mass Spectrometry
  • Massachusetts
  • Materials
  • Military Research
  • Polymer Chemistry
  • Polymers
  • Spectra
  • X Rays

Readers

  • Nanofabrication and Microfabrication.
  • Organic Chemistry
  • Polymer Science and Engineering.

Technology Areas

  • Microelectronics