Radiolysis of Resist Polymers. IV. Poly(p-substituted-alpha-methylstyrenes).

Abstract

The effect of saver-substituent on the radiation chemistry of poly(alpha-methylstyrene) (PMS) was compared for the fluoro (PFMS), chloro (PCMS), bromo (PBMS) isopropyl (PIPMS) and methoxy (PMEOM) derivatives. The radiolysis yields, ESR spectra and GC-MS analysis of products were obtained. PMEOMS and PIPMS gel readily by gamma-radiation. They may be useful as negative resist materials. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1983
Accession Number
ADA132044

Entities

People

  • G. N. Babu
  • J. C. W. Chien
  • P. H. Lu
  • S. L. Hsu

Organizations

  • University of Massachusetts Amherst

Tags

Communities of Interest

  • C4I

DTIC Thesaurus Topics

  • Alkenes
  • Chemistry
  • Electron Capture
  • Electron Spin Resonance
  • Electrons
  • Engineering
  • Gamma Rays
  • Ionizing Radiation
  • Mass Spectrometry
  • Materials
  • Military Research
  • Molecular Weight
  • Polymer Chemistry
  • Polymers
  • Radiation
  • Radiation Chemistry
  • Spectra

Fields of Study

  • Chemistry

Readers

  • Nanofabrication and Microfabrication.
  • Nuclear and Radiation Engineering.
  • Organic Chemistry