Radiolysis of Resist Polymers. 2. Poly(haloalkylmethacrylates) and Copolymers with Methylmethacrylate.

Abstract

Homopolymers of 2-fluoroethyl methacrylate (FEMA), 2-chlorethyl methacrylate (CEMA) 2-bromoethyl methacrylate (BEMA), 2,2,2-trichloroethyl methacrylate (TCEMA), 2,3-dibromopropyl methacrylate (DBPMA) and copolymers with MMA over a range of compositions have been synthesized. Gamma-radiolysis yields for scission (Gs), crosslinking (Gx) and radical formation (Gr) were determined. The volatile products were analyzed by GC-MS. Probable mechanisms of radiolysis of all polymers were proposed. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1983
Accession Number
ADA132095

Entities

People

  • A. Narula
  • G. N. Babu
  • P. H. Lu
  • S. L. Hus
  • Xiangchong Li

Organizations

  • University of Massachusetts Amherst

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemistry
  • Electron Capture
  • Electrons
  • Engineering
  • Halogens
  • Ionizing Radiation
  • Macromolecules
  • Mass Spectrometry
  • Massachusetts
  • Materials
  • Methacrylates
  • Military Research
  • Molecular Weight
  • Polymers
  • Radiation
  • Spectra
  • X Rays

Readers

  • Organic Chemistry
  • Polymer Science and Technology

Technology Areas

  • Microelectronics