Study of Plasma Chemistry and Plasma Processing.
Abstract
The final technical report describes studies related to plasma chemistry and plasma processing funded by the Office of Naval Research during the period December 15, 1979-June 15, 1983 (Contract : N00014-80-C-0244, NR SRO-016). Two experimental systems needed for a detailed study of plasma etching and plasma deposition of thin films were constructed. A detailed study was made of the plasma processing of polymer films. Another part of the studies involved an investigation of the basic mechanisms important in the volume synthesis of materials. The three related areas of research mentioned are described in detail. The resulting scientific publications and presentations at conferences, as well as the personnel involved are given in appendices. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1983
- Accession Number
- ADA132207
Entities
People
- H. J. Oskam
Organizations
- University of Minnesota