Research and Development of Subsurface Acoustic Wave Device Configurations for Sensor Applications.

Abstract

Subsurface acoustic wave modes that are sensitive to substrate strain but insensitive to temperature and surface fluid loading were sought for sensor applications. The properties of Stoneley-like interface waves in the layered structure SiO2/LiNbO3 were examined. A horizontal-shear surface wave in the same material configuration was found to be insensitive to surface fluids and was further studied for sensor applications. Zero first order temperature coefficients were found for these modes by varying the SiO2 film thickness. Surface skimming bulk waves in quartz were also examined and found to possess the most attractive properties for continued work in acoustic wave sensor development. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 1983
Accession Number
ADA133659

Entities

People

  • Donald E. Cullen
  • Gerald Meltz
  • Thomas W. Grudkowski

Organizations

  • United Technologies Corporation

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Acoustic Propagation
  • Acoustic Waves
  • Attenuation
  • Doppler Effect
  • Elastic Properties
  • Electrical Engineering
  • Materials Processing
  • Measurement
  • Phase Velocity
  • Piezoelectric Crystals
  • Rayleigh Waves
  • Signal Processing
  • Surface Acoustic Wave Sensors
  • Surface Acoustic Waves
  • Surface Waves
  • Thin Films
  • Transducers

Readers

  • Acoustical Oceanography.
  • Atmospheric Science / Meteorology, specifically Wind Wave Turbulence.
  • Microwave Engineering.