Development of Short Gate Fet's.

Abstract

A summary of initial work performed under Air Force contract 'Development of Short Gate Fet's' is presented. Approach taken toward fabrication of high speed fet's is discussed. Expected materials and fabrication problems are outlined. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1983
Accession Number
ADA133852

Entities

People

  • Michael G. Spencer

Organizations

  • Howard University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force
  • Compound Semiconductors
  • Construction
  • Contracts
  • Deep Ultraviolet Lithography
  • Electrical Engineering
  • Electron Beam Lithography
  • Electron Microscopes
  • Fabrication
  • Field Effect Transistors
  • Implantation
  • Ion Implantation
  • Lithography
  • Materials
  • Photolithography
  • Semiconductors
  • Space Charge

Readers

  • Integrated Circuit Design and Technology.
  • Technical Research and Report Writing.