Study Ion-Solid Interactions and Material Characterization with a New High-Resolution Scanning Ion Probe.
Abstract
The program is a collaboration between the University of Chicago and Hughes Research Labs. The major goal is to produce two 60 KeV high resolution (10-100 A), high current density (1 A/sq cm) ion microscopes microprobes. The project is partly funded by the NSF. During the first year of the program, the basic optical and overall engineering design of the two ion microprobes was consolidated, with the procurement and contraction phase being completed near the end of the second year.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 15, 1983
- Accession Number
- ADA133896
Entities
People
- Riccardo Levi-setti
Organizations
- University of Chicago