Theoretical Study of Laser-Stimulated Chemical Vapor Deposition Processes of Importance in Microelectronics.
Abstract
Recent experiments have demonstrated that laser radiation incident on a gas surface interface can stimulate and control the process of vapor deposition onto the surface. This research project has been a theoretical analysis of the deposition and related laser-stimulated processes, with special attention given to the microscopic dynamics of energy flow associated with such processes. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1983
- Accession Number
- ADA136433
Entities
People
- Thomas F. George
Organizations
- University of Rochester