Studies of III-V Compound Semiconductors for Optical and Microwave Applications.
Abstract
Compound semiconductors of GaAs and (GaAl) As were studies for optical and microwave applications. Two growth processes were employed for device fabrication: (1) the liquid-phase epitaxy (LPE) and (2) the molecular beam epitaxy (MBE). The procedure for LPE growth was well established in the laboratory. On the other hand, the MBE growth process required a considerable amount of effort to establish the growth procedure and optimize the growth conditions. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 02, 1984
- Accession Number
- ADA137849
Entities
People
- Shuo Wang
Organizations
- University of California, Berkeley