Development of a 3-D Microscale Topography System, Phase I.
Abstract
This report summarizes the work done in Phase I of a program to develop a 3-D surface measurement system using a stereo pair of SEM images. Phase I consisted of a comprehensive literature survey to define the state-of-the-art in stereo-microscopy (Task 1) and a set of experiments to establish the feasibility of the proposed method (Task 2). Section II summarizes results from Phase I. Section III describes the results of the literature survey which fulfills the objectives of Task 1. Details on the computerized literature search are provided in Appendix A. The proof-of-concept experiments are discussed in Section IV and Appendix B. Finally, a description of the system to automate stereometry and construct a viable 3-D surface measurement tool is provided in Section V.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1983
- Accession Number
- ADA137871
Entities
People
- B. B. Aggarwal
- S. S. Gassel
- T. M. Yonushonis