Development of a 3-D Microscale Topography System, Phase II.

Abstract

This report describes the technical work accomplished in the second phase of a program to develop an automated, three-dimensional, quantitative surface topography measurement system using a stereo-pair of scanning electron microscope (SEM) micrographs. The system embodies the disciplines of stereo-microscopy and stereo-photogrammetry. The first phase of the program (ONR Contract N00014-79-C-0792) explored the technical feasibility of making quantitative three-dimensional measurements of surface topography using a stereo-pair of SEM micrographs. The objectives of the second phase of the program (ONR Contract N00014-80-C-0937) were to develop the hardware and software necessary to implement the surface topography measurement system.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1983
Accession Number
ADA137872

Entities

People

  • B. B. Aggarwal
  • R. F. Wehr

Tags

Communities of Interest

  • Air Platforms
  • C4I
  • Sensors

DTIC Thesaurus Topics

  • Algorithms
  • Computers
  • Control Systems
  • Converters
  • Coordinate Systems
  • Dwell Time
  • Electron Microscopes
  • Gray Scale
  • Images
  • Integrated Systems
  • Materials
  • Measurement
  • Microscopy
  • Plastic Explosives
  • Three Dimensional
  • Video Amplifiers
  • Video Signals

Readers

  • Instructional Design and Training Evaluation.
  • Nanofabrication and Microfabrication.
  • Technical Research and Report Writing.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems