Oxide Bond Energies for the Calibration of Matrix Effects in Secondary Ion Mass Spectrometry.

Abstract

Analyses of trace and major elements in group III-V compound matrices by secondary ion mass spectrometry (SIMS) have shown that practical ion yields are linearly related to the matrix composition. The affinity of the matrix to oxygen appears to be the critical factor in this relationship. A direct relationship between the sloped of these calibration lines, determined for elements in the same column of the periodic table, and the first ionization potential of the respective elements has also been shown. (Author)

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Mar 28, 1984
Accession Number
ADA139633

Entities

People

  • A. A. Galuska
  • G. H. Morrison

Organizations

  • Cornell University Department of Chemistry and Chemical Biology

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Acquisition
  • Calibration
  • Chemistry
  • Compound Semiconductors
  • Data Acquisition
  • Data Analysis
  • Elements
  • Floods
  • Ion Implantation
  • Ionization
  • Ionization Potentials
  • Mass Spectra
  • Mass Spectrometry
  • Oxides
  • Semiconductors
  • Spectrometry
  • Spectroscopy

Fields of Study

  • Chemistry

Readers

  • Combustion science or combustion engineering.
  • Quantum spin resonance or Electron Paramagnetic Resonance spectroscopy.
  • Semiconductor Device Technology