Investigation of Charge Coupled Devices for Signal Processing.
Abstract
New constant capacitance voltage transient methods are developed. Traps from ion implantation damage are profiled and characterized. New methods of determination of both majority and minority carrier capture rates at traps in one diode is developed. Two-dimensional numerical analyses with new boundary equations are demonstrated for micron and submicron silicon MOS devices. Dangling bound and hydrogen bonding of interface states and bulk dopant acceptor (boron) traps are experimentally demonstrated. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 01, 1984
- Accession Number
- ADA139820
Entities
People
- C. T. Sah
Organizations
- University of Illinois Urbana–Champaign