Development of Short Gate FET's.

Abstract

Annual results on research for development of short gate FET's is reported. High material purity was obtained on in house liquid phase and vapor phase reactors. Quarter micron metal lines have been fabricated using deep uv lithography. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1983
Accession Number
ADA140819

Entities

People

  • M. G. Spencer

Organizations

  • Howard University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Calibration
  • Chemical Etching
  • Construction
  • Deep Ultraviolet Lithography
  • Electrical Engineering
  • Electron Beam Lithography
  • Electron Microscopes
  • Engineering
  • Fabrication
  • Field Effect Transistors
  • Liquid Phases
  • Lithography
  • Materials
  • Military Research
  • Phase
  • Photolithography
  • Vapor Phases

Readers

  • Analytical Chemistry
  • Electrical Engineering
  • Technical Research and Report Writing.