Computer Simulation Studies of Sputtering from Clean Tungsten and Nitrogen Reacted Tungsten and Molybdenum Surfaces.
Abstract
The Naval Postgraduate School computer simulation model QRAD was used to study sputtering from clean and nitrogen reacted tungsten, and from nitrogen reacted molybdenum, for (001) surfaces bombarded by normal incidence argon ions in the energy range from 0.5 keV to 3.0 keV. The simulation results are compared to experimental data obtained by Winters, who concludes, that the difference in the cross sections for the sputtering of nitrogen from W(001) and Mo(001) is dominated by the adsorbate-substrate mass difference since the other important parameters are similar. The simulation however shows little dependence on the substrate mass, but a strong dependence of the sputtering cross sections on the distance of the adatoms above the substrate. The nitrogen position is required to be higher on tungsten than on molybdenum. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1983
- Accession Number
- ADA140900
Entities
People
- D. Meyerhoff
Organizations
- Naval Postgraduate School