Air as an Adjustable Insulator for C-V and G-V Analysis of Semiconductor Surfaces.

Abstract

An adjustable metal-air-semiconductor capacitor was fabricated using a Pb disk suspended 1700 - 3600 A above an n-type <111> surface. Experimental differential capacitance versus voltage and differential conductance versus voltage curves are similar to those previously obtained for metal-oxide-semiconductor capacitors. (Author)

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Document Details

Document Type
Technical Report
Publication Date
May 01, 1984
Accession Number
ADA141437

Entities

People

  • A. Adams
  • J. Drucker
  • J. Moreland
  • J. P. Kotthaus
  • Paul K. Hansma

Organizations

  • University of California, Santa Barbara

Tags

DTIC Thesaurus Topics

  • Abstracts
  • Air Gaps
  • California
  • Capacitance
  • Capacitors
  • Diameters
  • Dielectrics
  • Materials
  • Measurement
  • Military Research
  • Security
  • Semiconductor Devices
  • Semiconductor Physics
  • Semiconductors
  • Thickness
  • United States
  • West Germany

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  • Electrical Engineering
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics