Theory of Laser-Induced Surface Chemistry with Applications to Microelectronics and Heterogeneous Catalysis.
Abstract
Theory and experiments are reviewed for how laser radiation can stimulate various component mechanisms which contribute to the complex chemistry involved in heterogeneous catalysis. These mechanisms include the processes of desorption, migration and chemical reactions at a gas-solid interface. Application of laser-induced surface chemistry to microelectronics in circuit deposition, lithography, annealing and final testing of the circuit are discussed. In addition to the review, some new theory is presented.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 01, 1984
- Accession Number
- ADA141832
Entities
People
- J. T. Lin
- Thomas F. George
- W. C. Murphy
Organizations
- University of Rochester