New Gallium Precursors for the Formation of High Purity Gallium Arsenide by Metal Organic Vapor Phase Deposition.

Abstract

The reduction of gallium trichloride monoammonia adduct with lithium hydride affords lithium trichlorohydrido gallate whereas the non-coordinated trichloride affords the known species, lithium tetrahydrido gallate. Attempts to prepare the ammonia adduct of gallane via lithium tetrahydrido gallate and ammonium chloride resulted in decomposition with hydrogen evolution. Exploratory investigation geared towards the formation of gallium perfluoroalkyls, via discharge reactions involving hexafluoroethane and trifluoroiodomethane, resulted in the gallium reduction of the pyrex reactors - construction of quartz reactors is therefore necessitated. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1984
Accession Number
ADA143361

Entities

People

  • E. P. Schram

Organizations

  • Ohio State University

Tags

DTIC Thesaurus Topics

  • Air Force
  • Chemical Synthesis
  • Chemical Vapor Deposition
  • Chemistry
  • Decomposition
  • Gallium
  • Gallium Arsenides
  • Gallium Compounds
  • Hydrides
  • Lithium
  • Lithium Hydride
  • Mass Spectroscopy
  • Materials
  • Metals
  • Phase
  • Spectra
  • Vapor Phases

Readers

  • Organic Chemistry
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene