Investigation and Development of Advanced Surface Microanalysis Techniques and Methods
Abstract
This two year research program is directed toward the advancement of the performance capabilities of surface microanalytical techniques in order to meet the current or near term, as well as future materials characterization demands of advance materials development programs. The goals of this research program are two fold: (1) Improve the sensitivity and quantitative capabilities of existing surface microanalysis techniques operating in the 1-50 microns lateral dimension regime, and (2) Investigate and evaluate techniques for obtaining trace level analyses of materials down to the 1/10 micrometer lateral dimensions.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1983
- Accession Number
- ADA144166
Entities
People
- Charles A. Evans Jr.
- Robert W. Odom