Investigation and Development of Advanced Surface Microanalysis Techniques and Methods

Abstract

This two year research program is directed toward the advancement of the performance capabilities of surface microanalytical techniques in order to meet the current or near term, as well as future materials characterization demands of advance materials development programs. The goals of this research program are two fold: (1) Improve the sensitivity and quantitative capabilities of existing surface microanalysis techniques operating in the 1-50 microns lateral dimension regime, and (2) Investigate and evaluate techniques for obtaining trace level analyses of materials down to the 1/10 micrometer lateral dimensions.

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Document Details

Document Type
Technical Report
Publication Date
Apr 01, 1983
Accession Number
ADA144166

Entities

People

  • Charles A. Evans Jr.
  • Robert W. Odom

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Advanced Materials
  • Auger Electrons
  • Charged Particles
  • Chemistry
  • Detectors
  • Ion Beams
  • Ion Sources
  • Ions
  • Laser Beams
  • Mass Spectrometers
  • Mass Spectrometry
  • Materials
  • Measurement
  • Semiconductors
  • Spectrometers
  • Spectrometry
  • Spectroscopy

Readers

  • Systems Analysis and Design
  • Thin Film Deposition Science.