An Investigation of the Solubility and Diffusivity of Chromium in Gallium Arsenide.

Abstract

Phase equilibria in the Ga-As-Cr system have been studied and determined between room temperature and 1300 C by differential thermal analysis and x-ray diffraction. Solubility studies of Cr in GaAs have also been performed together with three types of diffusion experiments: Indiffusion, outdiffusion and junction diffusion. Cr concentration-depth profiles determined by SIMS have been fitted to a diffusion model. Some of the anomalous behavior of Cr in GaAs observed here and in other studies have been explained in terms of the phase equilibria information and the solubility and diffusion results. (Author)

Open PDF

Document Details

Document Type
Technical Report
Publication Date
May 23, 1984
Accession Number
ADA144949

Entities

People

  • D. A. Stevensen
  • G. R. Woolhouse
  • M. Deal
  • T. J. Magee

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Chemistry
  • Compound Semiconductors
  • Crystal Growth
  • Differential Thermal Analysis
  • Diffraction
  • Electrical Properties
  • Heat Energy
  • Mass Spectrometry
  • Materials
  • Materials Science
  • Measurement
  • Phase Diagrams
  • Phase Transformations
  • Spectrometry
  • Thermal Analysis
  • Transition Temperature
  • Transitions

Fields of Study

  • Materials science

Readers

  • Fluid Dynamics.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics