Time Resolved Calorimetry of 30 nm Te-Films during Laser Annealing.

Abstract

The temperature of 30 nm thick Te-films has been studied during annealing with a XeCl Excimer laser. Using a pyroelectric thin film calorimeter melting, boiling and recrystalization were observed. Boiling was identified as the prevalent mechanism for the loss of material. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Aug 10, 1984
Accession Number
ADA145047

Entities

People

  • H. Coufal
  • Wonho Lee

Organizations

  • International Business Machines Corporation (Armonk, NY)

Tags

DTIC Thesaurus Topics

  • Annealing
  • Calorimeters
  • Calorimetry
  • Crystallization
  • Electromagnetic Shielding
  • Excimer Lasers
  • Films
  • Heat Energy
  • Lasers
  • Latent Heat
  • Materials
  • Military Research
  • Phase
  • Phase Transformations
  • Recrystallization
  • Thin Films
  • Transition Temperature

Fields of Study

  • Physics

Readers

  • Materials Science and Engineering.
  • Molecular Photonics/Laser Physics
  • Thermal Physics or Thermal Science.

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition