Time Resolved Calorimetry of 30 nm Te-Films during Laser Annealing.
Abstract
The temperature of 30 nm thick Te-films has been studied during annealing with a XeCl Excimer laser. Using a pyroelectric thin film calorimeter melting, boiling and recrystalization were observed. Boiling was identified as the prevalent mechanism for the loss of material. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 10, 1984
- Accession Number
- ADA145047
Entities
People
- H. Coufal
- Wonho Lee
Organizations
- International Business Machines Corporation (Armonk, NY)