Current Controlled LPE (Liquid Phase Epitaxy) Growth of Semiconductors.
Abstract
The primary objective of this study was to determine the optimum growth parameters for preparing uniform epitaxial crystalline layers of InAs, InSb, InAsSb and Si using the current controlled liquid phase epitaxy (CCLPE) technique. The original objective was later altered and the effort concentrated on the growth of InAs and Si by CCLPE. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1984
- Accession Number
- ADA145536
Entities
People
- A. Abul-fadl
- E. K. Stefanakos
- Srikanth Iyer
- W. J. Collis
Organizations
- North Carolina Agricultural and Technical State University