Structural Studies of Sputtered MoS(2) Films by Angle-Resolved Photoelectron Spectroscopy.
Abstract
Molybdenum disulfide films were deposited by sputtering on both single-crystal molybdenite and steel substrates to assess the effects of varying preparation conditions on film properties. They were then examined by angle-resolved x-ray photoelectron spectroscopy, which provided information on the orientation of the layered crystal substrate, on the film layers immediately adjacent to the substrate (within 1-10 nm), and on thicker, macroscopic films composed of relatively large crystallites (approximately 70-200 nm). For the 4.3-nm-thick films deposited on the crystal's basal-plane surface, the angular dependence of the photoelectron emission is the same as the substrate's, indicating preferred orientation within such films. Angular distribution studies for thicker films on steel substrates are consistent with previous Auger electron spectroscopy results and confirm the presence of oxide films of different thickness of lubricant films with varying orientations. The angle-dependence data were fit to models that describe the structure and composition of the films' surfaces.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 06, 1984
- Accession Number
- ADA146052
Entities
People
- L. U. Tolentino
- P. D. Fleischauer
Organizations
- The Aerospace Corporation