Particle Size Distribution on Surfaces in Clean Rooms
Abstract
Experimental particle size distributions of surfaces in clean rooms, resulting from the gravity settling of airborne particulates (fallout), are presented and found to be significantly different from the distributions described by Military Standard 1246A. Theoretical surface size distributions, based on fallout from a Federal Standard 209B airborne particle distribution, are derived and show good correlation with experimental data. Further experimental data and analysis are provided to show that surface cleaning tends to make a particle size distribution resulting from fallout approach the MIL-STD-1246A distribution. Recommendations are made to limit the use of MIL-STD-1246A, when specifying surface cleanliness levels, to surfaces that have been cleaned after exposure to fallout.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 30, 1984
- Accession Number
- ADA146057
Entities
People
- E. M. Shon
- O. Hamberg
Organizations
- The Aerospace Corporation