Interaction of UV-Laser Radiation with Molecular Surface-Films.
Abstract
A new process, Laser Photodeposition (based on surface photo-chemistry), has been demonstrated as means for localized material deposition. The spectroscopy, chemical kinetics and transport properties in adsorbate layers of metal alkyls and chlorides have been characterized. Surface-modification processes, based on reactions of monomolecular layers, have been demonstrated. The phenomenon of stimulated surface-plasma-wave scattering has been identified and shown widely important in laser/surface interactions. Applications have been demonstrated in microelectronics. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1984
- Accession Number
- ADA146311
Entities
People
- D. J. Ehrlich
- J. Y. Tsao
Organizations
- Massachusetts Institute of Technology