Silazane Precursors to Silicon Nitride.

Abstract

Pyrolysis of the liquid, organic-soluble ammonolysis product of dichlorosilane in a nitrogen atmosphere gives silicon nitride in 70% yield. Ammonia and disilylamine are the volatile products which are given off. Also studied has been the ammonolysis of methyldichlorosilane. Preliminary studies of the conversion of the CH3SiHCl2 ammonolysis product to ceramic materials are reported. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Oct 10, 1984
Accession Number
ADA146791

Entities

People

  • D. Seyferth
  • G. H. Wiseman

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics
  • Weapons Technologies

DTIC Thesaurus Topics

  • Carbon Carbon Composites
  • Ceramic Materials
  • Chemical Analysis
  • Chemistry
  • Classification
  • Composite Materials
  • Engineering
  • Ethers
  • Massachusetts
  • Materials
  • Materials Engineering
  • Materials Processing
  • Materials Science
  • Military Research
  • Molecular Weight
  • New York
  • United States

Fields of Study

  • Chemistry

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  • Organic Chemistry
  • Semiconductor Device Technology