Ion Microscopy of Metals and Semiconductors.

Abstract

During the last year several major changes have been instituted to improve the performance of CAMECA IMS-300 ion microscope system at the Naval Research Laboratory. The computer system dedicated to the instrument has been replaced, and new maintenance procedures have reduced electronic and vacuum problems associated with the instrument. Because of this, the overall reliability of the system has been improved, and the total turn around time necessary for SIMS analyses has been reduced. The utilization of the ion microscope for collaborative scientific research at NRL has been greatly improved.

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1984
Accession Number
ADA147118

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Auger Electron Spectroscopy
  • Auger Electrons
  • Chemistry
  • Detectors
  • Electron Spectroscopy
  • Electrons
  • Elements
  • Films
  • Ion Implantation
  • Mass Spectrometry
  • Materials
  • Materials Processing
  • Materials Science
  • Military Research
  • Semiconductors
  • Spectrometry
  • Spectroscopy

Readers

  • Computer Science/Computer Engineering/Data Science/Digital Signal Processing.
  • Technical Research and Report Writing.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems