Acoustic Microscopy for Nondestructive Evaluation of Materials
Abstract
The progress in the program for acoustic microscopy is described for the preceding six month interval. The acoustic microscope working at 2.5 GHz has been used to study a variety of materials and a number of integrated circuits. We are beginning to see interesting features in these micrographs - features which are not evident in the optical images. Some of the effort has been spent on improving the instrument so as to extract particular and specified information of a given object. This is being done in part with the aid of a dedicated microprocessor. Originator-supplied key words include: Imaging; Nondestructive evaluation; Silicon; and Image enhancement.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1979
- Accession Number
- ADA148536
Entities
People
- Calvin Quate
Organizations
- Stanford University