Surface Physics Instrumentation.

Abstract

A surface physics instrumentation system was assembled using components purchased from the DOD Instrumentation Grant in addition to components already present in the laboratory. The system consists of the following parts: Ultrahigh vacuum vacuum system with sample insertion, Auger electron spectrometer, Ion scattering spectrometer, Secondary ion mass spectrometer and work function measuring system. The instrument is a basic tool for preparing and analyzing well defined surfaces in UHV environment. (Author).

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Document Details

Document Type
Technical Report
Publication Date
Oct 26, 1984
Accession Number
ADA149304

Entities

People

  • G. Tompa
  • M. Seidl
  • W. Carr

Organizations

  • Stevens Institute of Technology

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Air Force
  • Auger Electrons
  • Charged Particles
  • Computer Programs
  • Computers
  • Electrons
  • Engineering
  • Instrumentation
  • Mass Spectrometers
  • Mass Spectrometry
  • Mass Spectroscopy
  • Measurement
  • Physics
  • Rods
  • Spectroscopy
  • Vacuum
  • Work Functions

Fields of Study

  • Physics

Readers

  • Aerospace Test and Evaluation
  • Research Science/Academic Research
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics