Laser Assisted Semiconductor Device Processing

Abstract

Contents: TASK 1-Laser Induced Surface Processing; TASK 2-Laser Blow- off Ion Implantation; APPENDIX A-The Effect of Carrier Diffusion on Laser- Heating of Lightly Damaged Semiconductors; and APPENDIX B-Laser Annealing of Low Fluence Ion Implanted Silicon.

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Document Details

Document Type
Technical Report
Publication Date
Nov 06, 1979
Accession Number
ADA149381

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Argon Lasers
  • Coefficients
  • Crystal Lattices
  • Crystal Structure
  • Electron Energy
  • Electrons
  • Energy
  • Energy Bands
  • Ion Implantation
  • Laser Beams
  • Lasers
  • Pulsed Lasers
  • Ruby Lasers
  • Semiconductor Devices
  • Semiconductors
  • Thermal Conductivity
  • Yag Lasers

Fields of Study

  • Materials science

Readers

  • Educational Psychology
  • Pulsed Power and Plasma Physics.
  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene